謝辞
本研究は，国立研究開発法人科学技術振興機構（JST）の戦略的創造研究推進事業（CREST）「新たな光機能や光物性の発現・利活用を基軸とする次世代フォトニクスの基盤技術」，およびJSPS科研費（#15H05763, #16H06082, #16K18087, #15J04654）の援助により行われた。
参考文献
1）S. E. Miller, “Integrated Optics: An Introduction”, Bell Labs Technical Journal 48, 2059 (1969).
2）E. A. J. Marcatili, “Dielectric Rectangular Waveguide and Directional Coupler for Integrated Optics”, Bell Labs Technical Journal 48, 2071 (1969).
3）末松安晴，“光集積回路”，電気四学会連合大会講演論文集 1223, 430 (1971).
4）L. A. Coldren, “High performance InP-based photonic ICs—A tutorial”, IEEE J. Lightwave Technol. 29, 554 (2011).
5）R. Nagarajan, M. Kato, D. Lambert, P. Evans, S. Corzine, V. Lal, J. Rahn, A. Nilsson, M. Fisher, M. Kuntz, J. Pleumeekers, A. Dentai, H.-S. Tsai, D. Krause, H. Sun, K.-T. Wu, M. Ziari, T. Butrie, M. Reffle, M. Mitchell, F. Kish and D. Welch, “Terabit/s class InP photonic integrated circuits”, Semicond. Sci. Technol. 27, 094003 (2012).
6）J. K. Doylend, A. P. Knights, “The evolution of silicon photonics as an enabling technology for optical interconnection,” Laser Photon. Rev. 6, 504 (2012).
7）P. P. Absil, P. Verheyen, P. De Heyn, M. Pantouvaki, G. Lepage, J. De Coster, J. Van Campenhout, “Silicon photonics integrated circuits: a manufacturing platform for high density, low power optical I/O’s,” Optics Express 23, 9369 (2015).
8）M. J. R. Heck, H.-W. Chen, A. W. Fang, B. R. Koch, D. Liang, H. Park, M. Sysak, J. E. Bowers, “Hybrid silicon photonics for optical Interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 333 (2011).
9）Z. Zhou, B. Yin, J. Michel, “On-chip light sources for silicon photonics,” Light: Science & Applications 4, e358 (2015).
10）D.-H. Kim, J.-H. Ahn, W. M. Choi, H.-S. Kim, T.-H. Kim, J. Song, Y. Y. Huang, Z. Liu, C. Lu, J. A. Rogers, “Stretchable and Foldable Silicon Integrated Circuits,” Science 320, 507 (2008).
11）J. Lee, J. Wu, M. Shi, J. Yoon, S. Park, M. Li, Z. Liu, Y. Huang, J. A. Rogers, “Stretchable GaAs Photovoltaics with Designs That Enable High Areal Coverage,” Adv. Mater. 23, 986 (2011).
12）M. Kaltenbrunner, T. Sekitani, J. Reeder, T. Yokota, K. Kuribara, T. Tokuhara, M. Drack, R. Schwödiauer, I. Graz, S. Bauer-Gogonea, S. Bauer, T. Someya, “An ultra-lightweight design for imperceptible plastic electronics,” Nature 499, 458 (2013).
13）R. T. Chen, “Polymer-based photonic integrated circuits,” Optics & Laser Technology 25, 347 (1993).
14）L. Eldada, L. W. Shacklette, “Advances in polymer integrated optics,” IEEE J. Quantum Electron. 6, 54 (2000).
15）Z. Zhang, D. Felipe, V. Katopodis, P. Groumas, C. Kouloumentas, H. Avramopoulos, J.-Y. Dupuy, A. Konczykowska, A. Dede, A. Beretta, A. Vannucci, G. Cangini, R. Dinu, D. Schmidt, M. Moehrle, P. Runge, J.-H. Choi, H.-G. Bach, N. Grote, N. Keil, M. Schell, “Hybrid Photonic Integration on a Polymer Platform,” Photonics 2, 1005 (2015).
16）L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, J. Hu, “Integrated flexible chalcogenide glass photonic devices,” Nature Photon. 8, 643 (2014).
17）T. Amemiya, T. Kanazawa, S. Arai, “Organic Membrane Photonic Integrated Circuits,” PCT application No. PCT/JP2017/1076.
18）R. Yoshimura, M. Hikita, S. Tomaru, S. Imamura, “Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate,” J. Lightwave Technol. 16, 1030 (1998).
19）T. Watanabe, N. Ooba, S. Hayashida, T. Kurihara, S. Imamura, “Polymeric optical waveguide circuits formed using silicone resin,” J. Lightwave Technol. 16, 1049 (1998).
20）Q. Bao, K. P. Loh, “Graphene Photonics, Plasmonics, and Broadband Optoelectronic Devices,” ACS Nano 6, 3677 (2012).
21）F. Xia, H. Wang, D. Xiao, M. Dubey, A. Ramasubramaniam, “Two-dimensional material nanophotonics,” Nature Photon. 8, 899 (2014).
22）T. Kanazawa, T. Amemiya, A. Ishikawa, V. Upadhyaya, K. Tsuruta, T. Tanaka, Y. Miyamoto, “Few-layer HfS2 Transistor,” Sci. Rep. 6, 22277 (2016).
23）M. Chhowalla, D. Jena, H. Zhang, “Two-dimensional semiconductors for transistors,” Nature Reviews Materials 1, 16052 (2016).
24）K. Fukukawa, M. Okazaki, Y. Sakata, T. Urakami, A. Okubo, “Transparent Polyimide and Precursor Thereof,” PCT application No. PCT/JP2014/062474.
25）T. Okamoto, N. Nunoya, Y. Onodera, S. Tamura, S. Arai, “Continuous wave operation of optically pumped membrane DFB laser,” Electron. Lett. 37, 1455 (2001).
26）S. Arai, N. Nishiyama, T. Maruyama, T. Okumura, “GaInAsP/InP membrane lasers for optical interconnects,” IEEE J. Sel. Topics Quantum Electron. 17, 1381 (2011).
27）D. Inoue, J. Lee, T. Hiratani, Y. Atsuji, T. Amemiya, N. Nishiyama, S, Arai, “Sub-milliampere threshold operation of butt-jointed built-in membrane DFB laser bonded on Si substrate,” Opt. Express 23, 7771 (2015).
2）E. A. J. Marcatili, “Dielectric Rectangular Waveguide and Directional Coupler for Integrated Optics”, Bell Labs Technical Journal 48, 2071 (1969).
3）末松安晴，“光集積回路”，電気四学会連合大会講演論文集 1223, 430 (1971).
4）L. A. Coldren, “High performance InP-based photonic ICs—A tutorial”, IEEE J. Lightwave Technol. 29, 554 (2011).
5）R. Nagarajan, M. Kato, D. Lambert, P. Evans, S. Corzine, V. Lal, J. Rahn, A. Nilsson, M. Fisher, M. Kuntz, J. Pleumeekers, A. Dentai, H.-S. Tsai, D. Krause, H. Sun, K.-T. Wu, M. Ziari, T. Butrie, M. Reffle, M. Mitchell, F. Kish and D. Welch, “Terabit/s class InP photonic integrated circuits”, Semicond. Sci. Technol. 27, 094003 (2012).
6）J. K. Doylend, A. P. Knights, “The evolution of silicon photonics as an enabling technology for optical interconnection,” Laser Photon. Rev. 6, 504 (2012).
7）P. P. Absil, P. Verheyen, P. De Heyn, M. Pantouvaki, G. Lepage, J. De Coster, J. Van Campenhout, “Silicon photonics integrated circuits: a manufacturing platform for high density, low power optical I/O’s,” Optics Express 23, 9369 (2015).
8）M. J. R. Heck, H.-W. Chen, A. W. Fang, B. R. Koch, D. Liang, H. Park, M. Sysak, J. E. Bowers, “Hybrid silicon photonics for optical Interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 333 (2011).
9）Z. Zhou, B. Yin, J. Michel, “On-chip light sources for silicon photonics,” Light: Science & Applications 4, e358 (2015).
10）D.-H. Kim, J.-H. Ahn, W. M. Choi, H.-S. Kim, T.-H. Kim, J. Song, Y. Y. Huang, Z. Liu, C. Lu, J. A. Rogers, “Stretchable and Foldable Silicon Integrated Circuits,” Science 320, 507 (2008).
11）J. Lee, J. Wu, M. Shi, J. Yoon, S. Park, M. Li, Z. Liu, Y. Huang, J. A. Rogers, “Stretchable GaAs Photovoltaics with Designs That Enable High Areal Coverage,” Adv. Mater. 23, 986 (2011).
12）M. Kaltenbrunner, T. Sekitani, J. Reeder, T. Yokota, K. Kuribara, T. Tokuhara, M. Drack, R. Schwödiauer, I. Graz, S. Bauer-Gogonea, S. Bauer, T. Someya, “An ultra-lightweight design for imperceptible plastic electronics,” Nature 499, 458 (2013).
13）R. T. Chen, “Polymer-based photonic integrated circuits,” Optics & Laser Technology 25, 347 (1993).
14）L. Eldada, L. W. Shacklette, “Advances in polymer integrated optics,” IEEE J. Quantum Electron. 6, 54 (2000).
15）Z. Zhang, D. Felipe, V. Katopodis, P. Groumas, C. Kouloumentas, H. Avramopoulos, J.-Y. Dupuy, A. Konczykowska, A. Dede, A. Beretta, A. Vannucci, G. Cangini, R. Dinu, D. Schmidt, M. Moehrle, P. Runge, J.-H. Choi, H.-G. Bach, N. Grote, N. Keil, M. Schell, “Hybrid Photonic Integration on a Polymer Platform,” Photonics 2, 1005 (2015).
16）L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, J. Hu, “Integrated flexible chalcogenide glass photonic devices,” Nature Photon. 8, 643 (2014).
17）T. Amemiya, T. Kanazawa, S. Arai, “Organic Membrane Photonic Integrated Circuits,” PCT application No. PCT/JP2017/1076.
18）R. Yoshimura, M. Hikita, S. Tomaru, S. Imamura, “Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate,” J. Lightwave Technol. 16, 1030 (1998).
19）T. Watanabe, N. Ooba, S. Hayashida, T. Kurihara, S. Imamura, “Polymeric optical waveguide circuits formed using silicone resin,” J. Lightwave Technol. 16, 1049 (1998).
20）Q. Bao, K. P. Loh, “Graphene Photonics, Plasmonics, and Broadband Optoelectronic Devices,” ACS Nano 6, 3677 (2012).
21）F. Xia, H. Wang, D. Xiao, M. Dubey, A. Ramasubramaniam, “Two-dimensional material nanophotonics,” Nature Photon. 8, 899 (2014).
22）T. Kanazawa, T. Amemiya, A. Ishikawa, V. Upadhyaya, K. Tsuruta, T. Tanaka, Y. Miyamoto, “Few-layer HfS2 Transistor,” Sci. Rep. 6, 22277 (2016).
23）M. Chhowalla, D. Jena, H. Zhang, “Two-dimensional semiconductors for transistors,” Nature Reviews Materials 1, 16052 (2016).
24）K. Fukukawa, M. Okazaki, Y. Sakata, T. Urakami, A. Okubo, “Transparent Polyimide and Precursor Thereof,” PCT application No. PCT/JP2014/062474.
25）T. Okamoto, N. Nunoya, Y. Onodera, S. Tamura, S. Arai, “Continuous wave operation of optically pumped membrane DFB laser,” Electron. Lett. 37, 1455 (2001).
26）S. Arai, N. Nishiyama, T. Maruyama, T. Okumura, “GaInAsP/InP membrane lasers for optical interconnects,” IEEE J. Sel. Topics Quantum Electron. 17, 1381 (2011).
27）D. Inoue, J. Lee, T. Hiratani, Y. Atsuji, T. Amemiya, N. Nishiyama, S, Arai, “Sub-milliampere threshold operation of butt-jointed built-in membrane DFB laser bonded on Si substrate,” Opt. Express 23, 7771 (2015).
28）V. Dolores-Calzadilla, D. Heiss, M. Smit, “Highly efficient metal grating coupler for membrane-based integrated photonics,” Optics Lett. 39, 2786 (2014).
■Organic membrane photonic integrated circuits（OMPICs）
■①Tomohiro Amemiya ②Toru Kanazawa ③Takuo Hiratani ④Shigehisa Arai ⑤Tatsuhiro Urakami
■①④Institute of Innovative Research(IIR), Tokyo Institute of Technology ②③④Department of Electrical and Electronic Engineering, Tokyo Institute of Technology ⑤Functional Materials Laboratory, Mitsui Chemicals, Inc.
①アメミヤ トモヒロ
東京工業大学 科学技術創成研究院 未来産業技術研究所
②カナザワ トオル
東京工業大学 工学院 電気電子系
③ヒラタニ タクオ
東京工業大学 工学院 電気電子系
④アライ シゲヒサ
東京工業大学 科学技術創成研究院 未来産業技術研究所／工学院 電気電子系
⑤ウラカミ タツヒロ
所属：三井化学㈱ 機能材料研究所
（月刊OPTRONICS 2017年3月号）
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